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Diffusion




IC Fabrication

  • The process of junction formation i.e. transition from p type to n type or vice versa , is typically accomplished by the process of diffusion.

  • Diffusion of impurity atoms into silicon crystal takes place at 900 degrees C to 1100 degrees C.

  • Impurity atoms are introduced onto the surface of a silicon wafer and diffused into the lattice because of their tendency to move from regions of high to low concentration.

  • Diffusion is used to form base,emitters and resistors in bipolar device technology , to form source and drain regions and to dope polysilicon in MOS device technology.







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